功能
典型應用
規格
類型 | IMM-200 | |
---|---|---|
Measurement | ||
Sensor inputs | 1 | |
測量頻率范圍 | 6.0 to 4.5 MHz (fixed) | |
Reference frequency stability | ±2 ppm 0-60°C | |
頻率分辨率 | ±0.0035 Hz @ 6 MHz | |
Rate and thickness resolution | 0.0042 ? (new crystal); 0.0076 ? (crystal @ 4.5 MHz) over 100 ms sample for material density = 1.0, Z-Ratio = 1.0 | |
Measurement interval | 100 ms | |
Measurement technique | ModeLock | |
Operation and Dimensions | ||
Input voltage | 24 V (dc) | |
工作溫度 | 0 to 50°C (32 to 122°F) | |
Size | 222.6 mm (8.76 in.) x 106.1 mm (4.18 in.) x 35.3 mm (1.39 in.) | |
Weight | 0.48 kg (1.05 lbs.) | |
Communication type | Ethernet, 1 RJ45 jack |
零件號
IMM-200 | |
---|---|
零件號 | 明細 |
785-602-G1 | IMM-200 Thin Film Deposition Monitor |
附件
零件號 | 明細 |
---|---|
Optional Power Supplies | The power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum. |
961-021-G1 | MPH 電源,80 - 250 VAC / 4 ft (1.2m) 美式插頭 |
961-021-G2 | MPH 電源,80 - 250 VAC / 4 ft (1.2 m) 美式插頭,帶 15 ft (4.5m) 延長電纜 |
961-021-G3 | MPH 電源,80 - 250 VAC / 4 ft (1.2 m) 美式插頭,帶 30 ft (9m) 延長電纜 |
961-021-G4 | MPH 電源,80 - 250 VAC / 4 ft (1.2 m) 230V 插頭 |
961-021-G5 | MPH 電源,80 - 250 VAC / 4 ft (1.2 m) 230V 插頭,帶有 15 ft (4.5m) 延長電纜 |
961-021-G6 | MPH 電源,80 - 250 VAC / 4 ft (1.2 m) 230V 插頭,帶有 30 ft (9m) 延長電纜 |
961-021-G7 | Power Supply Kit IL 240V |
961-021-G8 | Power Supply Kit IL 4.5 M Extension |
961-021-G9 | Power Supply Kit IL 9.0 M Extension |
961-021-G10 | Power Supply Kit UK 240V |
961-021-G11 | Power Supply Kit UK 4.5 M Extension |
961-021-G12 | Power Supply Kit UK 9.0 M Extension |
Optional Mounting Bracket | |
785-202-G1 | Mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet |
785-201-G1 | Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet |
Optional Communications Cable | |
600-1190-P1 | ETHERNET COMUNICATION CABLE 1 METER |
600-1190-P2 | SPEC- ETHERNET COMMUNICATION CABLE .3M |
600-1190-P4 | ETHERNET COMUNICATION CABLES 4.3 METER |
600-1190-P8 | Cable, Ethernet Communication, 7.6 Meter |
600-1190-P15 | ETHERNET COMUNICATION CABLE 15.3 METER |
耗材
名稱 | 說明 |
---|---|
石英監控器晶體 | 石英監控器晶體 |
手冊
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