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Edge CDG025D2 with EtherCAT 0.1 … 1000 托 / 毫巴

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詳細(xì)信息 在線詢價

好處

  • 易于集成,EtherCAT,各種滿刻度和法蘭,標(biāo)配兩個設(shè)定點
  • 輕松一鍵調(diào)零或遠(yuǎn)程信號調(diào)零指令,可調(diào)零點偏移
  • 診斷端口用于快速維修和維護(hù)
  • 防腐陶瓷傳感器
  • 的*信號穩(wěn)定性
  • 溫度補(bǔ)償
  • 傳感器防污染保護(hù)
  • 合規(guī)性與標(biāo)準(zhǔn):CE、EN、UL、SEMI、RoHS

典型應(yīng)用

  • 刻蝕、PVD 和其他半導(dǎo)體制造過程
  • 數(shù)據(jù)存儲和顯示制造設(shè)備
  • 工業(yè)真空設(shè)備
  • 常規(guī)高精度壓力測量

規(guī)格

類型 1000 Torr, 1100 mbar 500 ... 10 Torr / mbar 1 Torr / mbar 0.25 Torr / mbar 0.1 Torr / mbar
精度 (1) % of reading 0.2 0.2 0.2 0.25 0.5
溫度效應(yīng)          
零點 percent FS/°C 0.005 0.005 0.015 0.02 0.02
滿量程 % of reading / °C 0.01 0.01 0.01 0.03 0.03
壓力,大 kPa (absolute) 400 260 260 130 130
分辨率 percent FS 0.003 0.003 0.003 0.003 0.003
低讀數(shù) percent FS 0.01 0.01 0.01 0.01 0.01
建議的低讀數(shù) percent FS 0.05 0.05 0.05 0.05 0.05
建議的低控制壓力 percent FS 0.5 0.5 0.5 0.5 0.5
溫度          
傳感器 °C 25 25 25 25 25
運行(環(huán)境) °C +5 … +50 +5 … +50 +5 … +50 +5 … +50 +5 … +50
在法蘭處烘烤 °C ≤110 ≤110 ≤110 ≤110 ≤110
貯存 °C –20 … +65 –20 … +65 –20 … +65 –20 … +65 –20 … +65
電源電壓 +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%)
功耗          
運行溫度 W ≤1 ≤1 ≤1 ≤1 ≤1
輸出信號(模擬) V (dc) 0 … +10 0 … +10 0 … +10 0 … +10 0 … +10
反應(yīng)時間 (2) ms 30 30 30 130 130 / 30 (3)
保護(hù)等級 IP 40 IP 40 IP 40 IP 40 IP 40
標(biāo)準(zhǔn)          
CE 合規(guī) EN 61000?6?2/-6-3, EN 61010 & RoHS EN 61000?6?2/-6-3, EN 61010 & RoHS EN 61000?6?2/-6-3, EN 61010 & RoHS EN 61000?6?2/-6-3, EN 61010 & RoHS EN 61000?6?2/-6-3, EN 61010 & RoHS
ETL 認(rèn)證 UL 61010?1, CSA 22.2 No.61010?1 UL 61010?1, CSA 22.2 No.61010?1 UL 61010?1, CSA 22.2 No.61010?1 UL 61010?1, CSA 22.2 No.61010?1 UL 61010?1, CSA 22.2 No.61010?1
SEMI 合規(guī) SEMI S2 SEMI S2 SEMI S2 SEMI S2 SEMI S2
電氣連接 D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male
設(shè)定點          
設(shè)定點數(shù)量 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2)
繼電器觸點 ≤30 ≤30 ≤30 ≤30 ≤30
滯后 percent FS 1 1 1 1 1
診斷端口          
協(xié)議 RS232-C RS232-C RS232-C RS232-C RS232-C
讀數(shù) pressure, status, ID pressure, status, ID pressure, status, ID pressure, status, ID pressure, status, ID
設(shè)置 set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
暴露于真空的材料 Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5))
內(nèi)部容積          
內(nèi)部容積 1/2'' 管 cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
內(nèi)部容積 DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
內(nèi)部容積 DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
內(nèi)部容積 8 VCR® cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
重量          
重量 1/2'' 管 g 837 837 837 837 837
重量 DN 16 ISO KF g 852 852 852 852 852
重量 DN 16 CF-R g 875 875 875 875 875
重量 8 VCR® g 897 897 897 897 897
EtherCAT          
協(xié)議 EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT
通訊標(biāo)準(zhǔn) ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge ETG.5003.1 S (R) V1.1.0 Common Device ProfileETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge
數(shù)據(jù)率 Kbps 100000 100000 100000 100000 100000
節(jié)點地址 Explicit Device Identification Explicit Device Identification Explicit Device Identification Explicit Device Identification Explicit Device Identification
物理層 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
數(shù)字功能讀取 pressure, status, ID pressure, status, ID pressure, status, ID pressure, status, ID pressure, status, ID
數(shù)字功能設(shè)置 set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset
過程數(shù)據(jù) Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping
(CoE) SDO requests, responses and information SDO requests, responses and information SDO requests, responses and information SDO requests, responses and information SDO requests, responses and information
EtherCAT 連接器 RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT
電纜 shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher
電纜長度 m (ft.) ≤100 (330) ≤100 (330) ≤100 (330) ≤100 (330) ≤100 (330)

(1) 非線性,遲滯,在 25 °C 環(huán)境工作溫度中的可重復(fù)性,2 小時工作后無溫度影響。

(2) 提高 10 … 90 % FS  

(3) 僅用于壓力控制類型

(4) 18% 鉻,10% 鎳,3% 鉬,69% 鐵

CDG025D2 Edge Ordering Information

數(shù)據(jù)表

手冊

手冊

三維步驟文件

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